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  • Product Image - High-Speed Miniature Piezo Tilt Mirror
  • Sub-µrad Resolution
  • Very Fast: 10 kHz Resonant Frequency for Sub-Millisecond Response
  • Up to 4.4 mrad Optical Beam Deflection
  • Closed-Loop Versions for Better Linearity
  • Includes BK7 Mirror
  • Zero Friction Flexure Guiding System
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Item #

Item Name

Active Axes

Open Loop Angular Resolution

Unloaded Resonant Frequency

Closed Loop Angular Resolution

Open Loop Tilt Angle

Integrated Feedback Sensor

Closed Loop Linearity

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N/A Fast Miniature Piezo Mirror Tilter N/A θX N/A 0.05 µrad N/A 9.00 kHz N/A N/A 2.2 mrad ±20% N/A N/A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Fast Miniature Piezo Mirror Tilter N/A θX N/A 0.05 µrad N/A 9.00 kHz N/A 0.10 µrad N/A 2.2 mrad ±20% N/A Strain Gauge N/A 0.20 % N/A Specifications, CAD / Drawings, Manuals, Videos
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