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 All Categories    XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology > View Items  
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XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology

 
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  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives



   
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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency
P-733.2CD XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology XY 0.2 nm 20 N 100 x 100 µm 0.03 % 300 N .5 kHz
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