PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Search Catalog
 All Categories    XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology > Item # P-733.2CD
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

Item # P-733.2CD, XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology

  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives


Active Axes


Open Loop Resolution

0.2 nm

Max. Normal Load

20 N

Travel Range

100 x 100 µm

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

300 N

Unloaded Resonant Frequency

.5 kHz

Closed Loop Travel Range

100 µm

Integrated Feedback Sensor

2 x Capacitive

Closed Loop Resolution

0.30 nm

Full-Range Repeatability (typ.)

±2.5 nm


2 N/µm ±20%

Pull Force Capacity (in Operating Direction)

100 N

Tilt (θX, θY) (typ.)

1/3 µrad

Electrical Capacitance

6.0 µF &plusman;20% / axis

Dynamic Operating Current Coefficient (DOCC)

7.5 µA/(Hz x µm) / axis

Resonant Frequency at 200 g Load

340 Hz ±20%

Resonant Frequency at 500 g Load

230 Hz ±20%

Operating Temperature Range

-20 to 80 ºC

Voltage Connection

Sub-D, Special

Sensor Connection

Sub-D, Special

Weight (with Cables)

580 g ±5%

Body Material


Recommended Amplifier / Controller

H, F, L



Imaging (resolution enhancement)


Optical trapping

Precision mask and wafer alignment

Scanning interferometry

Scanning microscopy

Semiconductor test equipment

Surface structure analysis

 CADs & Drawings, Manuals, Videos, Specs 

CADs & Drawings, Manuals, Videos, Specs

© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.