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 All Categories    XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
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Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology > Item # P-733.2CD  
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Item # P-733.2CD, XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology


  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes
XY

Open Loop Resolution
0.2 nm

Max. Normal Load
20 N

Travel Range
100 x 100 µm

Closed Loop Linearity
0.03 %

Push Force Capacity (in Operating Direction)
300 N

Unloaded Resonant Frequency
.5 kHz

Closed Loop Travel Range
100 µm

Integrated Feedback Sensor
2 x Capacitive

Closed Loop Resolution

0.30 nm

Full-Range Repeatability (typ.)
±2.5 nm

Stiffness
2 N/µm ±20%

Pull Force Capacity (in Operating Direction)
100 N

Tilt (θX, θY) (typ.)
1/3 µrad

Electrical Capacitance
6.0 µF &plusman;20% / axis

Dynamic Operating Current Coefficient (DOCC)

 View
7.5 µA/(Hz x µm) / axis

Resonant Frequency at 200 g Load
340 Hz ±20%

Resonant Frequency at 500 g Load
230 Hz ±20%

Operating Temperature Range
-20 to 80 ºC

Voltage Connection
Sub-D, Special

Sensor Connection
Sub-D, Special

Weight (with Cables)
580 g ±5%

Body Material
Al

Recommended Amplifier / Controller
H, F, L

Application
Biophysics
Biotechnology
Imaging (resolution enhancement)
Nanomanipulation
Optical trapping
Precision mask and wafer alignment
Scanning interferometry
Scanning microscopy
Semiconductor test equipment
Surface structure analysis


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