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 All Categories    XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
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> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology > Item # P-733.2CD
 
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Item # P-733.2CD, XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology



  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes

XY

Max. Normal Load

20 N

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

300 N

Unloaded Resonant Frequency

.5 kHz

Integrated Feedback Sensor

2 x Capacitive

Stiffness

2 N/µm ±20%

Pull Force Capacity (in Operating Direction)

100 N

Tilt (θX, θY) (typ.)

1/3 µrad

Electrical Capacitance

6.0 µF &plusman;20% / axis

Dynamic Operating Current Coefficient (DOCC)

View
7.5 µA/(Hz x µm) / axis

Resonant Frequency at 200 g Load

340 Hz ±20%

Resonant Frequency at 500 g Load

230 Hz ±20%

Operating Temperature Range

-20 to 80 ºC

Voltage Connection

Sub-D, Special

Sensor Connection

Sub-D, Special

Weight (with Cables)

580 g ±5%

Body Material

Al

Recommended Amplifier / Controller

H, F, L

Application

Biophysics
Biotechnology

Imaging (resolution enhancement)

Nanomanipulation

Optical trapping

Precision mask and wafer alignment

Scanning interferometry

Scanning microscopy

Semiconductor test equipment

Surface structure analysis


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