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XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
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Item # P-733.2CD
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Item # P-733.2CD, XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
larger image
100 x 100 µm Travel Range
For XY Scanning & Positioning
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
Precision Flexure-Guiding System
Integrated Capacitive Sensors for Resolution <0.3 nm
50 x 50 mm Clear Aperture
Ultra-High Vacuum Version Available
Ultra-Fast XY and XYZ Versions Available
PICMA® High-Performance Multilayer Piezo Drives
Specifications
Active Axes
XY
Open Loop Resolution
0.2
nm
Max. Normal Load
20
N
Travel Range
100 x 100
µm
Closed Loop Linearity
0.03
%
Push Force Capacity (in Operating Direction)
300
N
Unloaded Resonant Frequency
.5
kHz
Closed Loop Travel Range
100
µm
Integrated Feedback Sensor
2 x Capacitive
Closed Loop Resolution
0.30
nm
Full-Range Repeatability (typ.)
±2.5
nm
Stiffness
2 N/µm ±20%
Pull Force Capacity (in Operating Direction)
100
N
Tilt (θ
X
, θ
Y
) (typ.)
1/3
µrad
Electrical Capacitance
6.0 µF &plusman;20% / axis
Dynamic Operating Current Coefficient (DOCC)
7.5 µA/(Hz x µm) / axis
Resonant Frequency at 200 g Load
340 Hz ±20%
Resonant Frequency at 500 g Load
230 Hz ±20%
Operating Temperature Range
-20 to 80
ºC
Voltage Connection
Sub-D, Special
Sensor Connection
Sub-D, Special
Weight (with Cables)
580 g ±5%
Body Material
Al
Recommended Amplifier / Controller
H, F, L
Application
Biophysics
Biotechnology
Imaging (resolution enhancement)
Nanomanipulation
Optical trapping
Precision mask and wafer alignment
Scanning interferometry
Scanning microscopy
Semiconductor test equipment
Surface structure analysis
CADs & Drawings, Manuals, Videos, Specs
CADs & Drawings, Manuals, Videos, Specs
© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.