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  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives



P-733 2-Axis XY-stages are designed for ultra-high precision motion control in planar positioning and scanning applications with nanometer accuracy and very fast motion and step and settle. The monolithic XY-table design also provides excellent stability. P-733 high precision 2-axis piezoelectric driven stages are operated with a closed-loop motion controller to achieve nanometer level accuracy. These high precision nanopositioning XY-tables are flexure guided without any parts that can wear and are maintenance-free with a very long service life, making them ideal for high performance automation applications in fields such as semiconductor metrology, super-resolution microscopy, image scanning and image stabilization, optical alignment, etc.

Computer Control / Software:

These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration. If long travel motion in the 100’s of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

How Does a Piezoelectric Nanopositioning Stage Work?

Piezo Nanopositioning Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.

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