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High-Speed Piezo Tip/Tilt Platforms
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High-Speed Piezo Tip/Tilt Platforms
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Fixed Orthogonal Axes with a Common Pivot Point
4 mad Optical Beam Deflection
For Mirrors to 100 mm ø
Sub-µrad Resolution
Closed-Loop Versions for Better Linearity
Differential Design for Excellent Temperature Stability
Zero Friction Flexure Guides
Single-Moving-Platform, Parallel-Kinematics Design: Equal Dynamics for all Axes, Better Linearity & Temperature Stability
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Results 1 - 2 of 2
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Item #
Item Name
Active Axes
Open Loop Resolution
Open Loop Angular Resolution
Unloaded Resonant Frequency
Closed Loop Angular Resolution
Open Loop Tilt Angle
Integrated Feedback Sensor
S-340.x0
High-Speed Piezo Tip/Tilt Platforms
θ
X
, θ
Y
0.10
µrad
0.10
µrad
1.40
kHz
N/A
2
mrad
N/A
S-340.xL
High-Speed Piezo Tip/Tilt Platforms
θ
X
, θ
Y
0.10
µrad
0.10
µrad
1.40
kHz
0.50
µrad
2
mrad
4 x LVDT
Results 1 - 2 of 2
1
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