Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

Integrated direct-measuring linear encoder with resolution 5 nm

Fields of application

• Industrial precision positioning
• Semiconductor technology
• Semiconductor tests
• Wafer inspection
• Lithography
• Nanoimprinting
• Nanometrology
• Motion in strong magnetic fields and in a vacuum

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Suitable for sophisticated vacuum applications
Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.