Compact Linear Stage with Ultrasonic Piezo Motor

Fast positioning

Space-saving and light

High guiding accuracy

Self-locking, no heat generation at rest

Low-noise operation

High Forces and Small Design Due to Piezo Motors

Only 45 mm in width

Incremental sensors with position resolution

XY combinations without adapter plate possible

Vacuum versions to 10^-9 hPa available on request

Compact XY Stage with Ultrasonic Piezo Motors

Fast positioning in 2 axes

Space-saving and light

High guiding accuracy

Self-locking, no heat generation at rest

Low-noise operation

OEM Walking Drive for Durable Applications with up to 15 mm/s Velocity and up to 50 N Push/Pull Force

Robust and industrially usable walking drive with PICMA® technology for extreme durability

Fastest and strongest drive of its size class

Variable runner lengths from 25 mm to 100 mm

Precise, nanometer precision positioning of loads up to 5 kg

Plug-and-play, thanks to PI proprietary controller technology

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

Integrated direct-measuring linear encoder with resolution 5 nm

Fields of application

• Industrial precision positioning
• Semiconductor technology
• Semiconductor tests
• Wafer inspection
• Lithography
• Nanoimprinting
• Nanometrology
• Motion in strong magnetic fields and in a vacuum

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Suitable for sophisticated vacuum applications
Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Smallest Linear Stage with Position Control, High Resolution and Affordable Price

Multi-axis system setups with adapter plate or bracket (available as an option).

Direct position measurement with integrated incremental encoder

Vacuum versions to 10^-6 hPa available on request.

Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 6 mm/s.

Vacuum
Vacuum versions to 10^-6 hPa are available on request.

Direct-measuring principle
The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.

Application fields
Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing