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L-306 Compact Precision Z Stages

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Compact design, multi-axis combinations
Stepper motors and closed-loop DC motors
Optional: Linear encoder for direct position measuring
Crossed roller guides
Noncontact reference and limit switches

Compact Z stage, versatile in use
Z stage with compact size due to folded drive with belt drive. Fits onto linear stages with M6 50 mm x 50 mm connection spacing (e.g., L-406).

Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Fields of application
Research, Semiconductor technology, Photonics, Automation

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Item #

Item Name

Travel Range

Min. Incremental Motion (typ.)

Unidirectional Repeatability (typ.)

Bidirectional Repeatability (typ.)

L-306.011100 L-306 Compact Precision Z Stages 13 mm 2.5 µm 0.5 µm ±2 µm
L-306.011112 L-306 Compact Precision Z Stages 13 mm 0.1 µm 0.1 µm ±0.5 µm
L-306.013112 L-306 Compact Precision Z Stages 13 mm 0.1 µm 0.1 µm ±0.5 µm
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