• Higher Speed Through Direct Drive
• Up to 2.2 kHz Resonant Frequency in X and Y
• 30 x 30 or 30 x 30 x 10 µm Travel Range
• 100 Picometers Resolution
• Capacitive Sensors for Highest Linearity
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Active Runout Compensation
• 50 x 50 mm Clear Aperture
• Frictionless Precision Flexure Guiding System
• PICMA® High-Performance Multilayer Piezo Drives

These high accuracy 2-axis stages and 3-axis nanopositioning stages are equipped with direct-drive piezo actuators for high speed motion with high acceleration. Operated with a closed-loop motion controller they achieve nanometer precision. PI flexure trajectory controlled piezo nanopositioning stages provide zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission. Single-axis and multi-axis piezo nano-positioning stages can be used in semiconductor metrology, super-resolution microscopy and imaging applications.

Computer Control / Software:

These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.

How Does a Piezo Nanopositioning System Work?

Piezo Nanopositioning Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller. less