Multi-Axis Nanopositioning Stages, Aperture, Piezoelectric

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Compact XY-Table, Piezo-Nanopositioner with Aperture
Compact XY-Table, Piezo-Nanopositioner with Aperture
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- Small Footprint : 60 x 60 mm
- 100 x 100 µm Travel Range
- Resolution to 0.8 nm
- For Cost-Sensitive Applications
- Clear Aperture: 20 x 20 mm
- PICMA ® High-Performance Multilayer Piezo Actuators
- Z-Stage also Available
Low-Profile, Parallel-Kinematic Piezo Nanopositioning Scanning XY-Table for Microscopy
Low-Profile, Parallel-Kinematic Piezo Nanopositioning Scanning XY-Table for Microscopy
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- Low Profile for Easy Integration: 16.5 mm
- Parallel Kinematics for Fast Response
- To 200 x 200 µm Travel Range
- 80 x 80 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
These 2-axis nanopositioning stages are driven by integrated piezo stacks with motion amplifiers. High resolution strain gauge sensors provide closed-loop nanopositioning performance in these 2-axis nanopositioning tables. These XY nanopositioning stages are a lower cost version ofmore
- Low Profile for Easy Integration: 16.5 mm
- Parallel Kinematics for Fast Response
- To 200 x 200 µm Travel Range
- 80 x 80 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
These 2-axis nanopositioning stages are driven by integrated piezo stacks with motion amplifiers. High resolution strain gauge sensors provide closed-loop nanopositioning performance in these 2-axis nanopositioning tables. These XY nanopositioning stages are a lower cost version of the capacitive feedback equipped P-541 and P-542 piezo XY stages. Piezo nanopositioners can be used in semiconductor metrology, super-resolution microscopy and imaging applications. For precision 2-axis linear motion with long travel XY-tables, check the V-741 linear motor nanopositioners. Motorized precision linear slides from PI are also available with air bearings and mechanical bearings. PI piezo flexure nanopositioners provide, zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission.

Computer Control / Software:

These XY nanopositioning tables be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.

How Do Piezoelectric Nanopositioning Stages Work?

Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.
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Low-Profile, Piezo Nanopositioning XY-Table for Scanning Microscopy with Parallel Metrology
Low-Profile, Piezo Nanopositioning XY-Table for Scanning Microscopy with Parallel Metrology
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- Low Profile for Easy Integration: 16.5 mm
- Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
- Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
- To 200 x 200 µm Travel Range
- Direct Drive Version for High-Speed Positioning & Scanning
- 80 x 80 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
P-541 and P-542 nanopositioning XY-tables use flexure-guided piezo-amplifiedmore
- Low Profile for Easy Integration: 16.5 mm
- Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
- Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
- To 200 x 200 µm Travel Range
- Direct Drive Version for High-Speed Positioning & Scanning
- 80 x 80 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
P-541 and P-542 nanopositioning XY-tables use flexure-guided piezo-amplified drive systems to achieve high performance, high accuracy and speed. The low-profile design allows for easy integration into microscopy and surface metrology applications. The large open aperture is an advantage in super-resolution microscopy semiconductor metrology and mask alignment.

These 2-axis nanopositioning stages are available with closed-loop position feedback for very high accuracy, nanometer repeatability and resolution in the nanometer and sub-nanometer range. For long travel linear slides and precision XY-stages, check the V-741 motorized nanopositioner XY-tables with 3-phase linear motors.

P-541 stages provide, zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission. life tested 100 Billion cycles for the Mars Mission. Computer Control / Software: These XY nanopositioning tables be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.
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Ultra-High-Speed Nanopositioning XY / XYZ-Tables for Scanning Microscopy, Parallel Metrology
Ultra-High-Speed Nanopositioning XY / XYZ-Tables for Scanning Microscopy, Parallel Metrology
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- Higher Speed Through Direct Drive
- Up to 2.2 kHz Resonant Frequency in X and Y
- 30 x 30 or 30 x 30 x 10 µm Travel Range
- 100 Picometers Resolution
- Capacitive Sensors for Highest Linearity
- Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Active Runout Compensation
- 50 x 50 mm Clear Aperture
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
These high accuracy 2-axis stages and 3-axis nanopositioning stages are equippedmore
- Higher Speed Through Direct Drive
- Up to 2.2 kHz Resonant Frequency in X and Y
- 30 x 30 or 30 x 30 x 10 µm Travel Range
- 100 Picometers Resolution
- Capacitive Sensors for Highest Linearity
- Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Active Runout Compensation
- 50 x 50 mm Clear Aperture
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
These high accuracy 2-axis stages and 3-axis nanopositioning stages are equipped with direct-drive piezo actuators for high speed motion with high acceleration. Operated with a closed-loop motion controller they achieve nanometer precision. PI flexure trajectory controlled piezo nanopositioning stages provide zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission. Single-axis and multi-axis piezo nano-positioning stages can be used in semiconductor metrology, super-resolution microscopy and imaging applications.

Computer Control / Software:

These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.

How Does a Piezo Nanopositioning System Work?

Piezo Nanopositioning Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.
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XY Piezo Nanopositioning / Scanning Tables With Parallel Metrology
XY Piezo Nanopositioning / Scanning Tables With Parallel Metrology
- 100 x 100 µm Travel Range
- For XY Scanning & Positioning
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Precision Flexure-Guiding System
- Integrated Capacitive Sensors for Resolution <0.3 nm
- 50 x 50 mm Clear Aperture
- Ultra-High Vacuum Version Available
- Ultra-Fast XY and XYZ Versions Available
- PICMA® High-Performance Multilayer Piezo Drives
P-733 2-Axis XY-stages are designed for ultra-high precision motion control in planar positioning and scanningmore
- 100 x 100 µm Travel Range
- For XY Scanning & Positioning
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Precision Flexure-Guiding System
- Integrated Capacitive Sensors for Resolution <0.3 nm
- 50 x 50 mm Clear Aperture
- Ultra-High Vacuum Version Available
- Ultra-Fast XY and XYZ Versions Available
- PICMA® High-Performance Multilayer Piezo Drives
P-733 2-Axis XY-stages are designed for ultra-high precision motion control in planar positioning and scanning applications with nanometer accuracy and very fast motion and step and settle. The monolithic XY-table design also provides excellent stability. P-733 high precision 2-axis piezoelectric driven stages are operated with a closed-loop motion controller to achieve nanometer level accuracy. These high precision nanopositioning XY-tables are flexure guided without any parts that can wear and are maintenance-free with a very long service life, making them ideal for high performance automation applications in fields such as semiconductor metrology, super-resolution microscopy, image scanning and image stabilization, optical alignment, etc.

Computer Control / Software:

These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration. If long travel motion in the 100’s of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

How Does a Piezoelectric Nanopositioning Stage Work?

Piezo Nanopositioning Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.
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Ultra-Precision Trajectory, Nanopositioning XY-Tables with Parallel Metrology
Ultra-Precision Trajectory, Nanopositioning XY-Tables with Parallel Metrology
- Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
- Flatness in the Low Nanometer Range
- Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation
- 100 x 100 µm Travel Range
- Direct-Metrology Capacitive Sensors for Higher Precision
- 56 x 56 mm Clear Aperture
- PICMA®High-Performance Multilayer Piezo Drives
P-734 nanopositioning X-Y tables are designed for surface metrology applications with extremely low out-of-plane motion.more
- Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
- Flatness in the Low Nanometer Range
- Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation
- 100 x 100 µm Travel Range
- Direct-Metrology Capacitive Sensors for Higher Precision
- 56 x 56 mm Clear Aperture
- PICMA®High-Performance Multilayer Piezo Drives
P-734 nanopositioning X-Y tables are designed for surface metrology applications with extremely low out-of-plane motion. These monolithic 2-axis nanopositioners use piezoelectric actuator drives to move a flexure guided system with a large aperture. Computer Control / Software: These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration. If long travel motion in the 100’s of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

Computer Control / Software:

These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration. If long travel motion in the 100’s of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

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Multi-Axis, Piezo Nanopositioning / Scanning Tables with Parallel Metrology
Multi-Axis, Piezo Nanopositioning / Scanning Tables with Parallel Metrology
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- XYø XYZ and XY Versions
- Precision Trajectory Control
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 200 µm
- Clear Aperture to 66 x 66 mm
- PICMA® High-Performance Multilayer Piezo Drives
These multi-axis nanometer precision motion stages are available in 2-axis, 3-axis and 4-axis versions. They provide linear and rotary motion with nanometer precision – ideal for optical alignment and scanning applications in microscopy, semiconductormore
- XYø XYZ and XY Versions
- Precision Trajectory Control
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 200 µm
- Clear Aperture to 66 x 66 mm
- PICMA® High-Performance Multilayer Piezo Drives
These multi-axis nanometer precision motion stages are available in 2-axis, 3-axis and 4-axis versions. They provide linear and rotary motion with nanometer precision – ideal for optical alignment and scanning applications in microscopy, semiconductor metrology, optics and photonics and laser technology. Driven by high-performance piezoelectric stack actuators they provide high velocity, very high accuracy and fast acceleration with minimal step and settle times. For laser processing and industrial precision automation applications where motion with 100’s of millimeters of travel is needed, other nanoposititioners such as the V-817 linear motor slides and integrated 2-axis long travel XY-tables are recommended. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

Computer Control, Programming, Software:

These multi-axis nanopositioning stages can be controlled and programmed by a computer via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.

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NanoCube® 3-Axis Piezo Nano Alignment Stage with Parallel Metrology
NanoCube® 3-Axis Piezo Nano Alignment Stage with Parallel Metrology
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- 350 x 350 x 250 µm Closed-Loop Travel Range
- Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
- Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
- 10 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Drives
- 1 nm Resolution
- Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10^-6 hPa
A newer version of this 3-axis linear nano-positioning stage is available as a 6-axis stage for nanopositioningmore
- 350 x 350 x 250 µm Closed-Loop Travel Range
- Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
- Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
- 10 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Drives
- 1 nm Resolution
- Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10^-6 hPa
A newer version of this 3-axis linear nano-positioning stage is available as a 6-axis stage for nanopositioning applications in all 6-degrees of freedom.

More information on piezo flexure 6-axis stages. When long travel motion in the 10 to 100mm range is required, check out our long travel 6-axis stages based on hexapod robots
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PIMars™ 3-Axis XYZ Stage with Piezo Nanopositioning / Scanning Drives and Parallel Metrology
PIMars™ 3-Axis XYZ Stage with Piezo Nanopositioning / Scanning Drives and Parallel Metrology
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- To 300 x 300 x 300 µm Travel Range
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Direct Metrology with Capacitive Sensors for Highest Precision
- 66 x 66 mm Clear Aperture
- Versions to 6-DOF
- Ultra-Fast XY and XYZ Versions Available
- Ultra-High-Vacuum Versions up to 10^-9 hPa Available
- Invar, Super-Invar and Titanium Versions Available
- PICMA® High-Performance Multilayer Piezo Drives
PImars P561, P562 and P563 3-axis nanopositioning stages are availablemore
- To 300 x 300 x 300 µm Travel Range
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Direct Metrology with Capacitive Sensors for Highest Precision
- 66 x 66 mm Clear Aperture
- Versions to 6-DOF
- Ultra-Fast XY and XYZ Versions Available
- Ultra-High-Vacuum Versions up to 10^-9 hPa Available
- Invar, Super-Invar and Titanium Versions Available
- PICMA® High-Performance Multilayer Piezo Drives
PImars P561, P562 and P563 3-axis nanopositioning stages are available with different high-resolution travel ranges. These nano-positioning XYZ tables are designed for ultra-high precision linear motion in three degrees of freedom. Applications that require nanometer precise motion in planar and 3D space benefit from the PImars nanopositioners. The operating principle of these XYZ nanopositioning stages is based on a wear-free and friction-free flexure guiding system and piezoelectric linear actuators. This highly efficient drive system is ideal for scanning applications with nanometer accuracy and very fast motion and step and settle. The parallel-kinematic design also provides excellent stability of the moving platform. PImars piezo stages are best operated with a digital, closed-loop motion controller, such as the E-727 or E-712 to achieve nanometer level accuracy. For computer control LabView drivers and MatLab examples are available for easy integration. Applications include super-resolution microscopy, 2-Photon Polymerization (manufacturing of nano-structures) semiconductor metrology, active optics and photonics alignment, etc.

If long travel motion in the 100's of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables and 3-axis motorized stages. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.
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P-545.xR8S PInano® XY / XYZ Piezo Nanopsitioning Tables for Microscopy
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PInano XY-microscope stages and XYZ-microscope stages are designed for super-resolution microscopy with nanometer steps resolution. Driven by high-performance piezoelectric stack actuators, PInano piezo stages provide high velocity, very high accuracy and fast acceleration with minimal step and settle times in the millisecond range – very important for scanning microscopy and particle tracking. These 2-axis and 3-axis nanopositioners combine with the U-780 low profile XY-tables formore
PInano XY-microscope stages and XYZ-microscope stages are designed for super-resolution microscopy with nanometer steps resolution. Driven by high-performance piezoelectric stack actuators, PInano piezo stages provide high velocity, very high accuracy and fast acceleration with minimal step and settle times in the millisecond range – very important for scanning microscopy and particle tracking. These 2-axis and 3-axis nanopositioners combine with the U-780 low profile XY-tables for long distance slide scanning with up to 135mm per axis. Ultrasonic motors provide extreme stability and a very wide dynamic range from microns/second to 100mm/second.

If very high loads and long travel motion in the 100’s of mm is required, check check our V-817 linear motor slides and our 2-axis long travel XY-tables and 3-axis motorized stages. Motorized precision linear slides from PI are available with frictionless air bearings and mechanical precision bearings.

Computer Control / Software:

These microscopy nanopositioning stages be computer controlled via a the included digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.

These High Value Nanopositioning Stages are designed for High-Resolution Microscopy

Inexpensive cost-optimized design with piezoresistive sensors
Including E-727 USB controller and software
Low profile for easy integration: 20 mm
Clear aperture for 3×1'' microscope slide, recessed insertable holder
Outstanding lifetime due to PICMA® piezo actuators
Subnanometer resolution, fast response time in the ms range

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Extensive software for rapid start of productive operation
Thanks to support of MATLAB and NI LabVIEW as well as all common operating systems (Windows, Linux, and macOS), integration succeeds in virtually every environment – quickly and efficiently. Sophisticated programming examples and software tools such as PIMikroMove shorten the time to productive operation considerably.
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