Compact X and XY-Tables with Piezoelectric Nanopositioning Drive
Multi-Axis Nanopositioning Linear Stages without Aperture
- Small Footprint: 44 x 44 mm
- 100 µm Travel
- Range Resolution to 0.2 nm
- For Cost-Sensitive Applications
- PICMA® High-Performance Multilayer Piezo Actuators
- Z-Stage also Available
Item # |
Item Name |
Active Axes |
Open Loop Resolution |
Max. Normal Load |
Travel Range |
Closed Loop Linearity |
Closed Loop Resolution |
Stiffness |
Unloaded Resonant Frequency |
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P-611.2S | N/A Compact X and XY-Tables with Piezoelectric Nanopositioning Drive | Active Axes N/A XY | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 15 N | Travel Range N/A | Closed Loop Linearity N/A 0.10 % | Closed Loop Resolution N/A 2.00 nm | Stiffness N/A 0.3 N/µm ±20% | Unloaded Resonant Frequency N/A 0.270 kHz |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
P-611.1S | N/A Compact X and XY-Tables with Piezoelectric Nanopositioning Drive | Active Axes N/A X | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 15 N | Travel Range N/A 100 µm | Closed Loop Linearity N/A 0.10 % | Closed Loop Resolution N/A 2.00 nm | Stiffness N/A 0.3 N/µm ±20% | Unloaded Resonant Frequency N/A 0.400 kHz |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
P-611.20 | N/A Compact X and XY-Tables with Piezoelectric Nanopositioning Drive | Active Axes N/A XY | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 15 N | Travel Range N/A | Closed Loop Linearity N/A 0.10 % | Closed Loop Resolution N/A | Stiffness N/A 0.3 N/µm ±20% | Unloaded Resonant Frequency N/A 0.270 kHz |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
P-611.10 | N/A Compact X and XY-Tables with Piezoelectric Nanopositioning Drive | Active Axes N/A X | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 15 N | Travel Range N/A 100 µm | Closed Loop Linearity N/A 0.10 % | Closed Loop Resolution N/A | Stiffness N/A 0.3 N/µm ±20% | Unloaded Resonant Frequency N/A 0.400 kHz |
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N/A Specifications, CAD / Drawings, Manuals, Videos |