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 All Categories    Multi-Axis Stages without Aperture
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture
 
 

Multi-Axis Stages without Aperture


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Product Image - Modular Piezo Flexure Nanopositioning Stages

Modular Piezo Flexure Nanopositioning Stages

(3)
  • Frictionless Precision Flexure Guiding System
  • Very Compact
  • Low Cost
  • Travel to 100 µm
  • XY and XYZ Combinations
Product Image - Compact Z and XZ Piezoelectric Nanopositioning Systems

Compact Z and XZ Piezoelectric Nanopositioning Systems

(4)
  • Small Footprint: 44 x 44 mm
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models
Product Image - Compact X and XY Piezoelectric Nanopositioning Systems

Compact X and XY Piezoelectric Nanopositioning Systems

(4)
  • Small Footprint: 44 x 44 mm
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Product Image - Modular XY and XYZ Piezo Flexure Nanopositioning Stages

Modular XY and XYZ Piezo Flexure Nanopositioning Stages

(6)
  • Cost-Effective XZ (XY) & XYZ Positioning
  • Travel Ranges to 100 x 100 x 100 µm
Product Image - PIHera Long-Range XY Piezo Nanopositioning Stages with Direct Metrology

PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology

(6)
  • XY-Travel to 1000 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Image - PicoCube High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

(2)
  • Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 µm Travel Range
  • Very Small Package
  • Rugged Design
Product Image - NanoCube XYZ Piezo Nanopositioning Systems

NanoCube® XYZ Piezo Nanopositioning Systems

(2)
  • 100 x 100 x 100 µm Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 nm Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers
Product Image - 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology

6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 µm Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives


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