• Small Footprint: 44 x 44 mm
• 100 µm Travel
• Range Resolution to 0.2 nm
• For Cost-Sensitive Applications
• PICMA® High-Performance Multilayer Piezo Actuators
• Open- and Closed-Loop Models

• Small Footprint: 44 x 44 mm
• 100 µm Travel
• Range Resolution to 0.2 nm
• For Cost-Sensitive Applications
• PICMA® High-Performance Multilayer Piezo Actuators
• Z-Stage also Available

Compact Parallel-Kinematic Piezo System for Nanopositioning and Fiber Alignment

Parallel-kinematic design for the highest stiffness in all spatial directions
Highly dynamic motion due to high resonant frequencies even with loads up to 100 g
Innovative product design for flexible use due to single mounting platform.
Only nanopositioner available on the market with ID chip functionality
Smallest and lightest NanoCube® with 100 µm travel range on the market

Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

• XY-Travel to 1000 µm
• Compact Design
• Resolution <1 nm
• Frictionless Precision Flexure Guiding System
• PICMA® High-Performance Multilayer Piezo Drives
• Direct Metrology with Capacitive Sensors for Highest Precision
• Up to 0.02% Position Accuracy
• X, XY, Z, XYZ Versions
• Vacuum-Compatible Versions

• Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
• Compact Manipulation Tool for Nanotechnology
• Resonant Frequency 9.8 kHz
• Ultra-High-Precision Capacitive Feedback
• Parallel-Motion Metrology for Highest Linearity and Stability
• 50 Picometers Resolution
• 5 x 5 x 5 µm Travel Range
• Very Small Package
• Rugged Design

• 100 x 100 x 100 µm Travel Range
• Very Compact: 44 x 44 x 44 mm
• 1 nm Resolution
• Ideal for Fiber-Alignment and Photonics Packaging Applications
• Optional E-760 Controller Card Features Built-In Optical Metrology
• Closed- and Open-Loop Versions
• Flexure-Guided Precision Trajectory Control
• Fast Scanning and Settling
• Large Variety of Controllers

• For Scanning and Positioning in all Six Degrees of Freedom
• 800 x 800 x 200 µm Linear Range
• Up to 10 mad Rotational Range
• Precision Trajectory Control
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Direct Metrology with Capacitive Sensors for Highest Precision
• ID-Chip for Auto Calibration Function
• PICMA® High - Performance Multilayer Piezo Drives