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 All Categories    Compact X and XY Piezoelectric Nanopositioning Systems
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > Compact X and XY Piezoelectric Nanopositioning Systems > Item # P-611.10
 

Item # P-611.10, Compact X and XY Piezoelectric Nanopositioning Systems


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  • Small Footprint: 44 x 44 mm
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available




 Specifications   

Active Axes

X

Open Loop Resolution

0.20 nm

Max. Normal Load

15 N

Travel Range

120 µm

Closed Loop Linearity

0.10 %

Weight (with Cables)

135 g ±5%

Body Material

S / Al

Stiffness

0.3 N/µm ±20%

Electrical Capacitance

1.5 µF &plusman;20%

Dynamic Operating Current Coefficient (DOCC)

View
1.7 µA/(Hz x µm)

Unloaded Resonant Frequency

0.400 kHz

Resonant Frequency at 30 g Load

300 Hz ±20%

Resonant Frequency at 100 g Load

195 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

VL

Recommended Amplifier / Controller

A, G

Application

Micromachining
Micromanipulation (life science)

Sample positioning (microscopy)

Semiconductor test systems


 MORE IMAGES 

·  Graph

·  XY-scanners


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Description/Datasheet




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