PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology
Z-Actuators / Vertical Translation Stages, Nanopositioning
- Z-Travel to 400 µm
- Low Profile
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
Item # |
Item Name |
Active Axes |
Open Loop Resolution |
Max. Normal Load |
Travel Range |
Closed Loop Linearity |
Unloaded Resonant Frequency |
Push Force Capacity (X) |
Click Link for More Information |
|---|---|---|---|---|---|---|---|---|---|
| P-620.ZCD | N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.1 nm | Max. Normal Load N/A 10 N | Travel Range N/A 65 µm | Closed Loop Linearity N/A 0.02 % | Unloaded Resonant Frequency N/A 1 kHz | Push Force Capacity (X) N/A 10 N |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-621.ZCD | N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 10 N | Travel Range N/A 140 µm | Closed Loop Linearity N/A 0.02 % | Unloaded Resonant Frequency N/A .790 kHz | Push Force Capacity (X) N/A 10 N |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-622.ZCD | N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.5 nm | Max. Normal Load N/A 10 N | Travel Range N/A 400 µm | Closed Loop Linearity N/A 0.02 % | Unloaded Resonant Frequency N/A .350 kHz | Push Force Capacity (X) N/A 10 N |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-62x.ZCL | N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology | Active Axes N/A Z | Open Loop Resolution N/A | Max. Normal Load N/A | Travel Range N/A | Closed Loop Linearity N/A | Unloaded Resonant Frequency N/A | Push Force Capacity (X) N/A |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-62x.Z0L | N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology | Active Axes N/A Z | Open Loop Resolution N/A | Max. Normal Load N/A | Travel Range N/A | Closed Loop Linearity N/A | Unloaded Resonant Frequency N/A | Push Force Capacity (X) N/A |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
