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All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-Actuators
 
 

Z-Actuators


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Product Image - Z/Tilt Piezoelectric Flexure Stage

Z/Tilt Piezoelectric Flexure Stage


  • Frictionless Precision Flexure Guiding System
  • Vertical Travel to 700 µm
  • Tilt to 0.7 degrees
  • Non-Magnetic Stainless Steel Design
Product Image - Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator

Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator


  • Vertical Travel to 1000 µm
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design
Product Image - Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology

Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology


  • Z-Travel to 300 µm
  • Low Profile
  • Frictionless Precision Flexure Guiding System
  • Internal Motion Amplifier
  • Closed-Loop Resolution <10 nm
  • PICMA®High-Performance Multilayer Piezo Drives
Product Image - IHera Vertical Piezo Nanopositioning Stages with Direct Metrology

PIHera® Vertical Piezo Nanopositioning Stages with Direct Metrology

(5)
  • Z-Travel to 400 µm
  • Low Profile
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions


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