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 All Categories    High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology > View Items
 

High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

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  • 10 kg Load Capacity
  • 1 nm Lateral Guiding Precision
  • Resolution <1 nm
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 µm Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System




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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-750.00 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology X 1.00 nm 100 N 75 µm N/A 800 N .600 kHz
P-750.10 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology X 1.00 nm 100 N 75 µm 0.10 % 800 N .600 kHz
P-750.20 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology X 1.00 nm 100 N 75 µm 0.03 % 800 N .600 kHz
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