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 All Categories    Single Axis Piezo Nanopositioning Systems
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems
 
 

Single Axis Piezo Nanopositioning Systems


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Product Image - Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology

Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology

(2)
  • Fast Response (1 kHz Resonant Frequency)
  • Stainless Steel Construction
  • Frictionless Precision Flexure Guiding System
  • 80 µm Travel Range
  • Direct Metrology with LVDT Sensor
  • Resolution <5 nm
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

(3)
  • 10 kg Load Capacity
  • 1 nm Lateral Guiding Precision
  • Resolution <1 nm
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 µm Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System
Product Image - PIHera Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

(6)
  • Travel to 950 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

Ultra-Compact Open-Loop PZT Nanopositioning Stage


  • Small Flexure-Guided Stage
  • 50 Picometer Resolution
  • 10 µm Travel
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • Closed-Loop Version Available
Product Image - Ultra-Compact Piezo NanoAutomation Stage with Direct Metrology

Ultra-Compact Piezo NanoAutomation® Stage with Direct Metrology


  • Smallest Flexure-Guided Stage with Capacitive Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - Piezo NanoAutomation Stages with Direct Metrology

Piezo NanoAutomation® Stages with Direct Metrology

(2)
  • Ultra-Fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capacitive Sensors for Highest Precision
  • 0.1 nm Resolution
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - LISA Piezo NanoAutomation Stages / Actuators with Direct Metrology

LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology

(3)
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 nm Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA®High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available


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