• P-630 High Dynamics Piezo Nanopositioning System

    1 Axis with Large Aperture

    Narrow and flat design

    Subnanometer resolution with capacitive sensors
    Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

    Automatic configuration and fast component exchange
    Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

  • Product Image - High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

    • 10 kg Load Capacity
    • 1 nm Lateral Guiding Precision
    • Resolution <1 nm
    • PICMA® High-Performance Multilayer Piezo Drives
    • Fast Response
    • 75 µm Travel Range
    • Direct Metrology with Capacitive Sensors for Highest Precision
    • Frictionless Precision Flexure Guiding System

  • Product Image - PIHera Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

    • Travel to 950 µm
    • Compact Design
    • Resolution <1 nm
    • Frictionless Precision Flexure Guiding System
    • PICMA® High-Performance Piezo Drives
    • Direct Metrology with Capacitive Sensors for Highest Precision
    • Up to 0.02% Position Accuracy
    • X, XY, Z, XYZ Versions
    • Vacuum-Compatible Versions


    The PIHera nanopositioning linear stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. These nanopositioning stages use piezo amplified flexures for longer travel in a more compact package and can resolve positions in the sub-nanometer range. The large variety of travel ranges and sizes makes them ideal for OEM and also cutting edge research applications. 1-axis and 2-axis (XY) stages as well as Z-axis stages are standard and can be combined to compact XZ or XYZ 3-axis stage systems. Piezoelectric nanopositioning stages provide faster response than other types of positioning stages with millisecond step and settle achievable – a critical performance parameter for semiconductor test and metrology, photonics alignment, laser control and quantum computing applications. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning stages the preferred positioning stage choice in highly dynamic processes such as high bandwidth scanning, error tracking and compensation, fast focusing, optical communication etc.

    PIHera Piezoelectric Nanopositioning Stage features:
    • Sub-nanometer position resolution
    • Closed Loop Operation with Nanometer Range Repeatability
    • Direct Metrology Capacitive Feedback for – Higher Precision, Especially Important for Semiconductor Metrology Applications
    • Excellent Trajectory Control with Flexure Guides.
    • 1-Axis, 2-Axis and 3-Axis Motion (X, XY, XYZ)
    • Extended Piezoelectric Travel Range up to 1500µm (closed loop), 1800µm (open loop)
    • Flexure Design without Play and Backlash Provides Higher Stiffness, Resonant Frequency and Higher Bandwidth
    • Standard Versions for Ambient and Vacuum Versions Offered. UHV Versions on request.


    How to Program a PIheara Piezo Stage: These ultra-precision linear translation stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series, or a multi-axis motion controller of the E-727 series. LabView drivers and MatLab examples are available for easy integration.

    How Do Piezo Stages Work?


    Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.

  • Product Image - Piezo NanoAutomation Stages with Direct Metrology

    • Ultra-Fast Response
    • Ultra-Precise Trajectory Control
    • Digital Controllers with Fast FiberLink Interface Available
    • ID-Chip for AutoCalibrate Function
    • Direct-Metrology Capacitive Sensors for Highest Precision
    • 0.1 nm Resolution
    • PICMA® High-Performance Multilayer Piezo Drives


    These ultra-high-precision linear piezo nanopositioning stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. Motion is generated by integrated direct-drive piezo that can resolve positions in the 0.1 nanometer range. The extremely high guidance precision is achieved with computer designed flexure guides. The nanopositioning stage performance makes them ideal for OEMs looking to automate metrology applications for semiconductor, photonics, mass storage or quantum computing applications in industry as well as for cutting-edge research. Piezoelectric nanopositioning stages provide faster response, step and settle performance than other types of drive technologies. Millisecond step and settle is a critical performance parameter in any modern precision automation application. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning stages the preferred positioning stage choice in highly dynamic processes such as high bandwidth scanning, error tracking and compensation, fast focusing, optical communication etc.

    • 1/10 nanometer positioning resolution
    • Closed Loop Operation with Nanometer Range Repeatability
    • Direct Metrology Capacitive Feedback for – Higher Precision, Especially Important for Semiconductor Metrology
    • Applications
    • Excellent Trajectory Control with Flexure Guides.
    • Direct Drive Design for Faster Response and Higher Bandwidth
    • Highly Stiff Flexure Design without Play and Backlash Provides Higher Bandwidth and Higher Path Fidelity
    • Standard Versions for Ambient and Vacuum Versions Offered. UHV Versions on request.


    How to Program a Piezo Stage: These ultra-precision linear translation stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.

    How Do Piezo Stages Work? Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.

  • Product Image - LISA Piezo NanoAutomation Stages / Actuators with Direct Metrology

    • Unique Design: Both Stage and Actuator
    • Frictionless Precision Flexure Guiding System
    • 0.05 nm Resolution
    • Direct Metrology with Capacitive Sensors for Highest Precision
    • Ultra-Fast Response, Very Compact
    • PICMA®High-Performance Multilayer Piezo Drives
    • ID-Chip for Auto Calibrate Function
    • Vacuum Versions Available

      These direct-drive, flexure guided piezoelectric actuators (nanopositioning linear motors) generate motion with integrated ultra-reliable PICMA® solid state piezoelectric stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. The frictionless, solid state drives can provide position resolution in the 50 picometer range (0.05 nanometers). FEA-computer optimized flexure guides allow for extremely high guidance precision. The very special design allows these nanopositioning actuators to be used in vertical and horizontal mode. Their picometer resolution and high speed makes these piezo stages ideal for OEMs looking to automate metrology applications for semiconductor, photonics, mass storage or quantum computing applications in industry as well as for cutting-edge research. Piezoelectric nanopositioning stages provide faster response, step and settle performance than other types of drive technologies. Millisecond step and settle is a critical performance parameter in any modern precision automation application. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning stages the preferred positioning stage choice in highly dynamic processes such as high bandwidth scanning, error tracking and compensation, fast focusing, optical communication etc.

      • 0.05 nanometer positioning resolution
      • Closed Loop Operation with Nanometer Range Repeatability
      • Direct Metrology Capacitive Feedback for – Higher Precision, Especially Important for Semiconductor Metrology Applications
      • Excellent Trajectory Control with Flexure Guides.
      • Direct Drive Design for Faster Response and Higher Bandwidth
      • Highly Stiff Flexure Design without Play and Backlash Provides Higher Bandwidth and Higher Path Fidelity
      • Standard Versions for Ambient and Vacuum Versions Offered. UHV Versions on request.


      How to Program a Piezo Stage: These ultra-precision linear translation stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.

      How Do Piezo NanoPositioning Stages Work? Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.