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All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Capacitive Sensors > Sub-Nanometer-Resolution Capacitive Position Sensors > Item # D-015.00
 

Item # D-015.00, Capacitive Sensors


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  • Measuring Range to 1000 µm
  • Resolution <0.01 nm
  • Linearity to 0.003 %
  • Bandwidth to 10 kHz
  • Integrated Linearization System (ILS)
  • Custom Designs





 Specifications   

Operating Temperature Range

-20 to +80 °C

Material

View
Aluminum

Active Surface

16.6 mm2

Nominal Measuring Distance

15 µm

Extended Measuring Distance

45 µm

Therm. Drift

View
50 ppm/K


 MORE IMAGES 

·  Probe and target Distance at center position

·  Measurement of Stability

·  Ultra-High-Resolution Sensors

·  Resolution Curve

·  Dimensional Drawing


 DOWNLOADS 

Description/Datasheet




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