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Capacitive Sensors


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Ultra-High-Resolution Sensors

Sub-Nanometer-Resolution Capacitive Position Sensors

(4)
  • Measuring Range to 1000 µm
  • Resolution <0.01 nm
  • Linearity to 0.003 %
  • Bandwidth to 10 kHz
  • Integrated Linearization System (ILS)
  • Custom Designs


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