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  • Ultra-High-Resolution Sensors

    Sub-Nanometer-Resolution Measuring Position Sensors, Capacitive

    (4)

    • Measuring Range to 1000 µm
    • Resolution <0.01 nm
    • Linearity to 0.003 %
    • Bandwidth to 10 kHz
    • Integrated Linearization System (ILS)
    • Custom Designs