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 All Categories    Hexapod 6-Axis-Parallel Kinematics Microrobot
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Motorized Stages, Hexapods, Controllers > Hexapods Six-Axis Micropositioning Systems > Hexapod 6-Axis-Parallel Kinematics Microrobot > View Items  
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Hexapod 6-Axis-Parallel Kinematics Microrobot

 
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  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 200 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 µm
  • Actuator Resolution to 0.005 µm
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF



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Item #

Item Name

Travel Range X, Y

Travel Range Z

Min. Incremental Motion, X, Y, Z

Max. Speed θX, θY, θZ
M-850.11 Hexapod 6-Axis-Parallel Kinematics Microrobot ±50 mm ±25 mm X, Y: 1 µm , Z: 0.5 µm 6 mrad/s
M-850.50 Hexapod 6-Axis-Parallel Kinematics Microrobot ±50 mm ±25 mm X, Y: 1 µm , Z: 0.5 µm 100 mrad/s
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