High-Load 6-Axis Hexapod Parallel Microrobot, Fiber Alignment Stage

Six Degrees of Freedom
Works in Any Orientation
No Moving Cables for Improved Reliability and Precision
200 kg Load Capacity (Vertical)
Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
Repeatability to ±1 µm
Actuator Resolution to 0.005 µm
Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
Vacuum-Compatible Versions
Linear and Rotary Multi-Axis Scans
Virtualized Center of Rotation (Pivot Point)
Sophisticated Controller Using Vector Algorithms
20000 h MTBF

Item #	Item Name	Travel Range X, Y	Travel Range Z	Min. Incremental Motion, X, Y, Z	Max. Speed	Max. Speed θ_X, θ_Y, θ_Z	Click Link for More Information
M-850.11	N/A Compact 6-Axis Hexapod Microrobot, Parallel Kinematics	N/A ±50 mm	N/A ±25 mm	N/A X, Y: 1 µm , Z: 0.5 µm	N/A 0.5 mm/s	N/A 6 mrad/s	N/A Specifications, CAD / Drawings, Manuals, Videos
M-850.50	N/A Compact 6-Axis Hexapod Microrobot, Parallel Kinematics	N/A ±50 mm	N/A ±25 mm	N/A X, Y: 1 µm , Z: 0.5 µm	N/A 8.0 mm/s	N/A 100 mrad/s	N/A Specifications, CAD / Drawings, Manuals, Videos