With position sensor for closed-loop operation

Compact design with integrated incremental encoder

Self-locking at rest even when closed-loop control is switched off

Inertia drive
Compact, inexpensive inertia drive principle (stick-slip). At rest, the drive is self-locking, requires no current, and does not generate any heat. It holds the position with maximum force.

Alignment of mechanical and optomechanical components
Stable alignment of optical paths. Long-term positioning stability: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical thread translation. Vacuum-compatible versions to 10-6 hPa available.

Integrated position sensor
An incremental encoder measures the relative motion to a freely definable reference position. In conjunction with the E-871 motion controller, the encoder resolution is up to <1 nm.
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Item #

Item Name

Linearity Error

Typical Velocity

Operating Frequency

Max. Permissible Operating Frequency During Continuous Operation

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N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 400 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A N-472 PiezoMike Miniature Linear Actuators N/A 2 µm N/A 2 mm/min N/A 2000 Hz N/A 200 Hz N/A Specifications, CAD / Drawings, Manuals, Videos
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