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L-310 Precision Z Stages

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Compact Multi-Axis Combinations with Linear and Rotation Stages

High-resolution encoder

DC, BLDC, and stepper motors

Zero-play ball screw

Vacuum-compatible items available

Precision-class Z stage
High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for highest stability. Vacuum-compatible product variants on request. Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range.

Minimum incremental motion and slow motion
In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder (L-310.xASD) achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration achieves constant low velocities of a few sensor increments per second.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Application fields
Precision positioning in industry and research, high duty cycles.




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Item #

Item Name

Pitch / Yaw (typ.)

L-310.2xSD L-310 Precision Z Stages ±150 µrad
L-310.2xAD L-310 Precision Z Stages ±150 µrad
L-310.023xxx L-310 Precision Z Stages ±150 µrad
L-310.025xxx L-310 Precision Z Stages ±150 µrad
  Results 1 - 4 of 4 1 


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