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 All Categories    A-311 PIglide IS Planar Scanning Stages with Air Bearing
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A-311 PIglide IS Planar Scanning Stages with Air Bearing

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High-performance, compact XY nanopositioning system

Ideal for scanning applications or high-precision positioning

Cleanroom compatible

Low profile

The high-precision PIglide IS XY planar scanner with air bearing has a flat design and is an alternative to the stacked XY stages. The efficient, compact design saves space in machines with limited installation space.

PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
Operation with digital controllers from leading manufacturers offers advanced control algorithms for improving the dynamics and error compensation.

Application fields
PIglide positioning systems are ideally suited for high-precision applications, such as inspection systems, laser marking, microscopy or scanning.




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  Results 1 - 5 of 5 1 

Item #

Item Name

Pitch (max.)

Yaw (max.)

A-311.Dxx A-311 PIglide IS Planar Scanning Stages with Air Bearing 20 µrad 10 µrad
A-311.Axx A-311 PIglide IS Planar Scanning Stages with Air Bearing 25 µrad 10 µrad
A-311.Bxx A-311 PIglide IS Planar Scanning Stages with Air Bearing 35 µrad 15 µrad
A-311.Cxx A-311 PIglide IS Planar Scanning Stages with Air Bearing 40 µrad 20 µrad
A-311.Fxx A-311 PIglide IS Planar Scanning Stages with Air Bearing 40 µrad 20 µrad
  Results 1 - 5 of 5 1 


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