• 10 mm Clear Aperture
  • Piezo Tripod Design Allows Z Motion and Tilt
  • Up to 2.4 mrad Optical Beam Deflection
  • Piston Movement up to 12 µm
  • Closed-Loop Versions for Better Linearity
  • For Optics, Mirrors or Other Components
  • Zero Friction Guiding Mechanism
  • Single-Moving-Platform, Parallel-Kinematics Design : Equal Dynamics for all Axes, Better Linearity & Temperature Stability


This Z-axis and tip/tilt piezo mirror mount and phase shifter family comes in many variations. Phase shifter versions with aperture are available as well as 3D Z-tip-tilt mounts for optics and mirrors, also with an aperture. It employs high-speed direct-drive piezo actuators for faster response and higher bandwidth. Closed Loop control with feedback sensors is available for excellent repeatability and accuracy! Applications of this fast, active optic 3-axis mirror mount are beam switching, beam dithering, laser beam control, laser cavity stabilization, image dithering and stabilization, optical canning, and cavity tuning.more
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Item #

Item Name

Active Axes

Closed Loop Resolution

Closed Loop Tilt Angle

Unloaded Resonant Frequency

Open Loop Linear Travel at 0 to 100 V

Integrated Feedback Sensor

Open Loop Linear Resolution

Stiffness (Z)

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N/A Multi-Axis Fast Piezo Mirror Mount Platforms and Z Positioners N/A Z N/A N/A N/A 9.50 kHz N/A 6 µm ±20% N/A N/A N/A 20 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Multi-Axis Fast Piezo Mirror Mount Platforms and Z Positioners N/A Z N/A N/A N/A 5.50 kHz N/A 12 µm ±20% N/A N/A N/A 10 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Multi-Axis Fast Piezo Mirror Mount Platforms and Z Positioners N/A Z θX θY N/A N/A N/A 9.50 kHz N/A 6 µm ±20% N/A N/A 0.01 µrad N/A 20 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Multi-Axis Fast Piezo Mirror Mount Platforms and Z Positioners N/A Z θX θY N/A N/A N/A 5.50 kHz N/A 12 µm ±20% N/A N/A 0.02 µrad N/A 10 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Multi-Axis Fast Piezo Mirror Mount Platforms and Z Positioners N/A Z θX θY N/A 0.40 nm N/A 1.2 mrad N/A 5.50 kHz N/A 12 µm ±20% N/A 3 x Strain gauge N/A 0.02 µrad N/A 10 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
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