Smallest Linear Stage with Position Control, High Resolution and Affordable Price

Multi-axis system setups with adapter plate or bracket (available as an option).

Direct position measurement with integrated incremental encoder

Vacuum versions to 10^-6 hPa available on request.

Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 6 mm/s.

Vacuum
Vacuum versions to 10^-6 hPa are available on request.

Direct-measuring principle
The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.

Application fields
Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing