LISA Piezo Stages / Linear Actuators, Direct Metrology, Nano-Automation

Unique Design: Both Stage and Actuator
Frictionless Precision Flexure Guiding System
0.05 nm Resolution
Direct Metrology with Capacitive Sensors for Highest Precision
Ultra-Fast Response, Very Compact
PICMA®High-Performance Multilayer Piezo Drives
ID-Chip for Auto Calibrate Function
Vacuum Versions Available

These direct-drive, flexure guided piezoelectric actuators (nanopositioning linear motors) generate motion with integrated ultra-reliable PICMA® solid state piezoelectric stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. The frictionless, solid state drives can provide position resolution in the 50 picometer range (0.05 nanometers). FEA-computer optimized flexure guides allow for extremely high guidance precision. The very special design allows these nanopositioning actuators to be used in vertical and horizontal mode. Their picometer resolution and high speed makes these piezo stages ideal for OEMs looking to automate metrology applications for semiconductor, photonics, mass storage or quantum computing applications in industry as well as for cutting-edge research. Piezoelectric nanopositioning stages provide faster response, step and settle performance than other types of drive technologies. Millisecond step and settle is a critical performance parameter in any modern precision automation application. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning stages the preferred positioning stage choice in highly dynamic processes such as high bandwidth scanning, error tracking and compensation, fast focusing, optical communication etc.
- 0.05 nanometer positioning resolution
- Closed Loop Operation with Nanometer Range Repeatability
- Direct Metrology Capacitive Feedback for – Higher Precision, Especially Important for Semiconductor Metrology Applications
- Excellent Trajectory Control with Flexure Guides.
- Direct Drive Design for Faster Response and Higher Bandwidth
- Highly Stiff Flexure Design without Play and Backlash Provides Higher Bandwidth and Higher Path Fidelity
- Standard Versions for Ambient and Vacuum Versions Offered. UHV Versions on request.
How to Program a Piezo Stage: These ultra-precision linear translation stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.

How Do Piezo NanoPositioning Stages Work? Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.

Item #	Item Name	Active Axes	Open Loop Resolution	Travel Range	Closed Loop Linearity	Push Force Capacity (in Operating Direction)	Unloaded Resonant Frequency	Click Link for More Information

P-753.1CD	N/A LISA Piezo NanoAutomation® Stages / Linear Actuators with Direct Metrology	N/A X	N/A 0.05 nm	N/A 12 µm	N/A 0.03 %	N/A 100 N	N/A 5.60 kHz	N/A Specifications, CAD / Drawings, Manuals, Videos
P-753.2CD	N/A LISA Piezo NanoAutomation® Stages / Linear Actuators with Direct Metrology	N/A X	N/A 0.1 nm	N/A 25 µm	N/A 0.03 %	N/A 100 N	N/A 3.70 kHz	N/A Specifications, CAD / Drawings, Manuals, Videos
P-753.3CD	N/A LISA Piezo NanoAutomation® Stages / Linear Actuators with Direct Metrology	N/A X	N/A 0.2 nm	N/A 38 µm	N/A 0.03 %	N/A 100 N	N/A 2.90 kHz	N/A Specifications, CAD / Drawings, Manuals, Videos