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Compact Piezo Elevation Stage with Aperture
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Compact Piezo Elevation Stage with Aperture
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Item # P-612.Z0L
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Item # P-612.Z0L, Compact Piezo Elevation Stage with Aperture
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Small Footprint: 60 x 60 mm
For Cost-Sensitive Applications
100 µm Travel
Range Resolution to 0.2 nm
Clear Aperture : 20 x 20 mm
PICMA® High-Performance Multilayer Piezo Actuators
Specifications
Active Axes
Z
Max. Normal Load
15
N
Unloaded Resonant Frequency
.490
kHz
Weight (with Cables)
275 g ±5%
Stiffness
0.6 N/µm ±20°
Tilt (θ
X
, θ
Y
) (typ.)
<20
µrad
Electrical Capacitance
3 µF ±20%
Resonant Frequency at 30 g Load
420 Hz ±20%
Operating Temperature Range
-40 to 150
ºC
Voltage Connection
VL
Sensor Connection
L
Body Material
Al
Recommended Amplifier / Controller
A, G
Application
Biotechnology
Interferometry
Microscopy
Nanopositioning
Quality assurance
Semiconductor Technology
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© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.
