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 All Categories    Compact Piezo Elevation Stage with Aperture
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Compact Piezo Elevation Stage with Aperture > Item # P-612.Z0L  
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Item # P-612.Z0L, Compact Piezo Elevation Stage with Aperture


  • Small Footprint: 60 x 60 mm
  • For Cost-Sensitive Applications
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • Clear Aperture : 20 x 20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators




 Specifications   

Active Axes
Z

Open Loop Resolution
0.2 nm

Max. Normal Load
15 N

Travel Range
100 µm

Unloaded Resonant Frequency
.490 kHz

Weight (with Cables)
275 g ±5%

Stiffness
0.6 N/µm ±20°

Tilt (θX, θY) (typ.)
<20 µrad

Electrical Capacitance
3 µF ±20%

Resonant Frequency at 30 g Load
420 Hz ±20%

Operating Temperature Range
-40 to 150 ºC

Voltage Connection
VL

Sensor Connection
L

Body Material
Al

Recommended Amplifier / Controller
A, G

Application
Biotechnology
Interferometry
Microscopy
Nanopositioning
Quality assurance
Semiconductor Technology


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