- Low Profile for Easy Integration: 16.5 mm
- Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
- Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
- To 200 x 200 µm Travel Range
- Direct Drive Version for High-Speed Positioning & Scanning
- 80 x 80 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
P-541 and P-542 nanopositioning XY-tables use flexure-guided piezo-amplified drive systems to achieve high performance, high accuracy and speed. The low-profile design allows for easy integration into microscopy and surface metrology applications. The large open aperture is an advantage in super-resolution microscopy semiconductor metrology and mask alignment.
These 2-axis nanopositioning stages are available with closed-loop position feedback for very high accuracy, nanometer repeatability and resolution in the nanometer and sub-nanometer range. For long travel linear slides and precision XY-stages, check the V-741 motorized nanopositioner XY-tables with 3-phase linear motors.
P-541 stages provide, zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission. life tested 100 Billion cycles for the Mars Mission. Computer Control / Software: These XY nanopositioning tables be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.
