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 All Categories    PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology
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Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology > Item # P-562.3CD
 
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Item # P-562.3CD, PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology



  • To 300 x 300 x 300 µm Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DOF
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives





 Specifications   

Active Axes

XYZ

Max. Normal Load

50 N

Closed Loop Linearity

0.03 %

Body Material

Al

Integrated Feedback Sensor

Capacitive

Push Force Capacity (X)

120 N

Push Force Capacity (Y)

120 N

Push Force Capacity (Z)

50 N

Pull Force Capacity (X)

30 N

Pull Force Capacity (Y)

30 N

Pull Force Capacity (Z)

30 N

Electrical Capacitance (X)

7.2 µF ±20%

Electrical Capacitance (Y)

7.2 µF ±20%

Electrical Capacitance (Z)

14.4 µF ±20%

Dynamic Operating Current Coefficient X (DOCC)

4.9 µA/(Hz x µm)

Dynamic Operating Current Coefficient Y (DOCC)

4.9 µA/(Hz x µm)

Dynamic Operating Current Coefficient Z (DOCC)

9.8 µA/(Hz x µm)

Unloaded Resonant Frequency

170 kHz

Unloaded Resonant Frequency (X)

View
170 Hz

Unloaded Resonant Frequency (Y)

170 Hz ±20%

Unloaded Resonant Frequency (Z)

315 Hz ±20%

Resonant Frequency at 330 G Load (X)

140 Hz ±20%

Resonant Frequency at 330 G Load (Y)

140 Hz ±20%

Resonant Frequency at 330 G Load (Z)

195 Hz ±20%

Operating Temperature

-20 to 80 ºC

Voltage and Sensor Connection

View
D

Recommended Amplifier / Controller

K, H

Application

Biotechnology
Mask & wafer alignment

Micromanipulation

Scanning interferometry

Scanning microscopy

Surface metrology


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