Short Settling Time and High Dynamic Linearity

Tip/tilt angle to 35 mrad, high optical deflection angle to 70 mrad (4°)
High resonant frequencies for dynamic motion and fast step-and-settle
Parallel-kinematic design: Two orthogonal tip/tilt axes with one common center of rotation
Strain sensors for high linearity
Different versions available: Without mirror, 1/2" mirror, 1" mirror

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
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