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 All Categories    High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
All Categories > Nanopositioning: Piezo Stages,
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> Piezo Steering Mirrors / Active Optics > Multi-Axis Tip/Tilt Platforms > High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners > Item # S-316.10
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Item # S-316.10, High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners

  • 10 mm Clear Aperture
  • Piezo Tripod Design Allows Z Motion and Tilt
  • Up to 2.4 mrad Optical Beam Deflection
  • Piston Movement up to 12 µm
  • Closed-Loop Versions for Better Linearity
  • For Optics, Mirrors or Other Components
  • Zero Friction Guiding Mechanism
  • Single-Moving-Platform, Parallel-Kinematics Design : Equal Dynamics for all Axes, Better Linearity & Temperature Stability

    Closed Loop Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.


Active Axes



Closed Loop Resolution

0.40 nm

Closed Loop Tilt Angle

1.2 mrad

Unloaded Resonant Frequency

5.50 kHz

Open Loop Linear Travel at 0 to 100 V

12 µm ±20%

Open Loop Tilt Angle

1.2 mrad ±20%

Integrated Feedback Sensor

3 x Strain gauge

Material (Case)


Material (Platform)


Open Loop Resolution

0.02 µrad

Open Loop Linear Resolution

0.02 µrad

Stiffness (Z)

10 N/µm ±20%

Electrical Capacitance

3 x 0.45 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

3 x 5 µA/(Hz x µm)

Resonant Frequency with Ø15 x 4 mm Glass Mirror

4.1 kHz ±20%

Resonant Frequency with Ø 20 x 4 mm Glass Mirror

3.4 kHz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

3 x VL, 2 m cable

Weight (without Cables)

55 g ±5%

Recommended Amplifier / Controller

H, D

Distance, Pivot Point to Platform Surface (T)

5 mm

Platform Moment of Inertia

150 g.mm2

Closed Loop Linear Travel

12 µm

Closed Loop Angular Resolution

0.05 µrad

Sensor Connection

3 x L, 2 m cable


Beam switching
Image stabilization


Laser beam stabilization

Laser beam steering and scanning

Laser cavity tuning

Optical filters

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