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 All Categories    6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > Item # P-587.6CD
 

Item # P-587.6CD, 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology


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  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 µm Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives




 Specifications   

Active Axes

XYZ, θX, θY, θZ

Max. Normal Load

50 N

Closed Loop Resolution

2.00 nm

Closed Loop Travel Range

800 µm

Closed Loop Travel in θX, θY, θZ

3 x 3 x 10 mrad

Integrated Feedback Sensor

Capacitive

Body Material

Al / Invar

Closed Loop Linearity (typ.)

XY: 0.004% (30 nm) Z: 0.01% (20 nm) rotations: 0.2% (2 µrad)

Electrical Capacitance (XY)

2 x 42 µF ±20% / axis

Electrical Capacitance (Z)

4 x 4.5 µF ±20%

Resonant Frequency XY (at 600 g load)

103 Hz ±20%

Resonant Frequency Z (at 600 g load)

220 Hz ±20%

Resonant Frequency θXY (at 600 g load)

308 Hz ±20%

Resonant Frequency θZ (at 600 g load)

140 Hz ±20%

Crosstalk, All Axes at Full Range

1 µrad

Operating Temperature Range

-20 to +80 °C

Voltage and Sensor Connection

View
ID

Weight (without Cables)

7.2 kg ±5%

Recommended Amplifier / Controller

E-710.6CD

Application

Metrology
Nanoimprinting

Nanomanufacturing

Nanopositioning

Precision mask and wafer alignment

Scanning interferometry

Semiconductor test equipment

Surface structure analysis

Travel Range

800 µm

Unloaded Resonant Frequency

0.250 kHz


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·  Dimensional Drawing


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Description / Datasheet / Order Info




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