- For Scanning and Positioning in all Six Degrees of Freedom
- 800 x 800 x 200 µm Linear Range
- Up to 10 mad Rotational Range
- Precision Trajectory Control
- Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Direct Metrology with Capacitive Sensors for Highest Precision
- ID-Chip for Auto Calibration Function
- PICMA® High - Performance Multilayer Piezo Drives
