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 All Categories    PIFOC® High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
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> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > PIFOC® High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology > Item # P-721.LLQ

Item # P-721.LLQ, PIFOC® High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology

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  • Scans and Positions Objectives with Sub-nm Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 µm, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Compatible with Metamorph™ Imaging Software
  • Quick Lock Adapter for Easy Attachment


Travel Range

90 µm

Open Loop Resolution

0.50 nm

Closed Loop Linearity

0.10 %

Push Force Capacity (in Operating Direction)

100 N

Unloaded Resonant Frequency

.580 kHz

Weight (with Cables)

230 g ±5%

Max. Objective Diameter

39 mm

Closed Loop Travel Range

100 µm

Integrated Feedback Sensor


Closed Loop Resolution

10.00 nm

Full-Range Repeatability (typ.)

±20 nm


0.3 N/µm &plusm;20%

Pull Force Capacity (in Operating Direction)

20 N

Tilt (θX) (typ.)

0.5 µrad

Tilt (θY) (typ.)

13 µrad

Lateral Runout (Y) (typ.)

100 nm

Electrical Capacitance

3.0 µF &plusm;20%

Dynamic Operating Current Coefficient (DOCC)

4.2 µA/(Hz x µm)

Resonant Frequency at 120 g Load

250 Hz ±20%

Resonant Frequency at 200 g Load

190 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection


Sensor Connection


Body Material


Recommended Driver / Controller

H, E


Autofocus systems

Confocal microscopy

Disk drive testing

Scanning interferometry

Semiconductor test equipment

Surface structure analysis


·  Custom PIFOC Nose Piece Nanopositioner for Microscope Turret

·  Dimensional Drawing

·  Quick Lock Thread Adapter



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