• 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
  • <0.1 Nanometer Resolution
  • Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Highest Thermal Stability
  • Aperture with Open-Loop Versions
  • 3 µm Travel Range
  • Compact Size : 30 mm Diameter x 10 mm
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Item #

Item Name

Active Axes

Closed Loop Linearity

Open Loop Resolution

Max. Normal Load

Travel Range

Integrated Feedback Sensor

Unloaded Resonant Frequency

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N/A High Speed Piezo Phase Shifter with Direct Metrology Option N/A Z N/A 0.03 % N/A 0.03 nm N/A 0.5 N N/A 3 µm N/A Capacitive N/A 25.00 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A High Speed Piezo Phase Shifter with Direct Metrology Option N/A Z N/A N/A 0.03 nm N/A 0.5 N N/A 3 µm N/A N/A 25.00 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
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