• Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 µm Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime


P-541 and P-542 nanopositioning XY-tables use flexure-guided piezo-amplified drive systems to achieve high performance, high accuracy and speed. The low-profile design allows for easy integration into microscopy and surface metrology applications. The large open aperture is an advantage in super-resolution microscopy semiconductor metrology and mask alignment.

These 2-axis nanopositioning stages are available with closed-loop position feedback for very high accuracy, nanometer repeatability and resolution in the nanometer and sub-nanometer range. For long travel linear slides and precision XY-stages, check the V-741 motorized nanopositioner XY-tables with 3-phase linear motors.

P-541 stages provide, zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission. life tested 100 Billion cycles for the Mars Mission. Computer Control / Software: These XY nanopositioning tables be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.
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Item #

Item Name

Active Axes

Unloaded Resonant Frequency

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity

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N/A Low-Profile, Piezo Nanopositioning XY-Table for Scanning Microscopy with Parallel Metrology N/A XY N/A .5 kHz N/A 0.2 nm N/A 20 N N/A 200 x 200 µm N/A 0.03 % N/A 50 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Low-Profile, Piezo Nanopositioning XY-Table for Scanning Microscopy with Parallel Metrology N/A XY N/A .370 kHz N/A 0.4 nm N/A 20 N N/A 200 x 200 µm N/A 0.03 % N/A 50 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Low-Profile, Piezo Nanopositioning XY-Table for Scanning Microscopy with Parallel Metrology N/A XY N/A 1.50 kHz N/A 0.1 nm N/A 20 N N/A 200 x 200 µm N/A 0.03 % N/A 50 N N/A Specifications, CAD / Drawings, Manuals, Videos
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