• Small Footprint : 60 x 60 mm
  • 100 x 100 µm Travel Range
  • Resolution to 0.8 nm
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
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Item #

Item Name

Active Axes

Open Loop Resolution

Closed Loop Linearity

Closed Loop Resolution

Stiffness

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N/A Compact XY-Table, Piezo-Nanopositioner with Aperture N/A XY N/A 0.80 nm N/A 0.50 % N/A 2.00 nm N/A 0.3 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Compact XY-Table, Piezo-Nanopositioner with Aperture N/A XY N/A 0.80 nm N/A N/A N/A 0.3 N/µm ±20% N/A Specifications, CAD / Drawings, Manuals, Videos
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