• To 300 x 300 x 300 µm Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DOF
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives


PImars P561, P562 and P563 3-axis nanopositioning stages are available with different high-resolution travel ranges. These nano-positioning XYZ tables are designed for ultra-high precision linear motion in three degrees of freedom. Applications that require nanometer precise motion in planar and 3D space benefit from the PImars nanopositioners. The operating principle of these XYZ nanopositioning stages is based on a wear-free and friction-free flexure guiding system and piezoelectric linear actuators. This highly efficient drive system is ideal for scanning applications with nanometer accuracy and very fast motion and step and settle. The parallel-kinematic design also provides excellent stability of the moving platform. PImars piezo stages are best operated with a digital, closed-loop motion controller, such as the E-727 or E-712 to achieve nanometer level accuracy. For computer control LabView drivers and MatLab examples are available for easy integration. Applications include super-resolution microscopy, 2-Photon Polymerization (manufacturing of nano-structures) semiconductor metrology, active optics and photonics alignment, etc.

If long travel motion in the 100's of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables and 3-axis motorized stages. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.