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Sub-Nanometer-Resolution Capacitive Position Sensors

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  • Measuring Range to 1000 µm
  • Resolution <0.01 nm
  • Linearity to 0.003 %
  • Bandwidth to 10 kHz
  • Integrated Linearization System (ILS)
  • Custom Designs




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Item Name

Power Supply

Analog Output

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Temperature Drift (typ.)

E-509.CxA Capacitive Sensor Electronics ±15 V ±5 V (0V - 10V) 0.115 ppm/√Hz -30 ppm/K
D-015.00 Capacitive Sensors N/A N/A N/A N/A
D-050.00 Capacitive Sensors N/A N/A N/A N/A
D-100.00 Capacitive Sensors N/A N/A N/A N/A
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