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UPL-120 Precision Z Stages

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Excellent accuracy for high loads

Integrated optical limit switches

Available with direct-measuring encoder

Reference-class Z stage
Extremely accurate and reliable positioning. Crossed roller guides for smooth feed at high loads. Stress-relieved aluminum base for highest stability. Drive variants with DC motor and 2-phase stepper motor. Noncontact limit switches.

Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Application fields
Industry and research, e.g., semiconductor inspection, fiber alignment.




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6635911030 UPL-120 Precision Z Stages ±100 µrad ±100 µrad
6635911130 UPL-120 Precision Z Stages ±100 µrad ±100 µrad
6635921030 UPL-120 Precision Z Stages ±100 µrad ±100 µrad
6635921130-0001 UPL-120 Precision Z Stages ±100 µrad ±100 µrad
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