PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Search Catalog
 All Categories    A-322 PIglide HS Planar Scanning Stages with Air Bearing
All Categories > A-322 PIglide HS Planar Scanning Stages with Air Bearing > View Items  
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

A-322 PIglide HS Planar Scanning Stages with Air Bearing

Check up to five results to perform an action.

Ideal for scanning applications or high-precision positioning
Cleanroom compatible
Three performance classes: Base, Plus, and Ultra

PIglide reference-class XY positioning system
The PIglide HS planar scanner has magnetic linear motors, vacuum preload, and an absolute encoder: Contact- and friction-free motion for the highest accuracy and reliability.

The positioning system was designed to maximize the throughput and ensure the highest precision. Flexible coupling of the bridge axis to the gantry axis allows lateral decoupling without sacrificing the stiffness of the system.

The A-322 is coupled with industry-leading controllers and drive modules from ACS that offer superior servo performance, advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.

The A-322 series is a starting point for further adaptations. Critical core components such as linear motors, measuring systems, and air bearing assemblies have already been developed, tested, and have proven their capabilities. Depending on the application and requirements of the customer, a variant of the A-322 series forms the ideal starting point for a tailor-made, ultraprecise solution.

Absolute encoder
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Long lifetime, cleanroom compatible drag chains
The A-322 has high-quality, long-lasting ribbon cables and pneumatic hoses. Extensive research and development has resulted in an optimized cable management system that enables millions of maintenance-free cycles. Teflon coating ensures low particle formation.

Application fields
PIglide positioning systems are ideally suited for many high-precision applications, such as metrology, photonics, and precision scanning as well as in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Compare Items
  Results 1 - 3 of 3 1 

Item #

Item Name

Sort by

Travel Range, Bridge Axis

Size of the Motion Platform

Positioning Accuracy, Calibrated


A-322 Base A-322 PIglide HS Planar Scanning Stages with Air Bearing 350; 500 mm 250 x 268 mm ±0.35 µm 1 µm
A-322 Plus A-322 PIglide HS Planar Scanning Stages with Air Bearing 350; 500 mm 250 x 268 mm ±0.35 µm 1 µm
A-322 Ultra A-322 PIglide HS Planar Scanning Stages with Air Bearing 350; 500 mm 250 x 318 mm ±0.2 µm 0.5 µm
  Results 1 - 3 of 3 1 

© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.