Inexpensive high performance nanopositioning stage

Ideal for scanning applications or high-precision positioning

Cleanroom compatible

PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability

Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
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Velocity, Unloaded (Max.)

Acceleration (max.)

Nominal Current (RMS) (max.)

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N/A A-110 Air Bearing Linear Slides N/A 50 mm N/A 0.5 m/s N/A 10 m/s² N/A 2.2 A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A A-110 Air Bearing Linear Slides N/A 100 mm N/A 0.5 m/s N/A 10 m/s² N/A 2.2 A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A A-110 Air Bearing Linear Slides N/A 200 mm N/A 1 m/s N/A 30 m/s² N/A 3.2 A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A A-110 Air Bearing Linear Slides N/A 300 mm N/A 1 m/s N/A 30 m/s² N/A 3.2 A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A A-110 Air Bearing Linear Slides N/A 400 mm N/A 1 m/s N/A 30 m/s² N/A 3.2 A N/A Specifications, CAD / Drawings, Manuals, Videos
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