Item # |
Item Name |
Active Axes |
Open Loop Resolution |
Max. Normal Load |
Closed Loop Linearity |
Stiffness |
Closed Loop Resolution |
Push Force Capacity (in X and Y) |
Click Link for More Information |
---|---|---|---|---|---|---|---|---|---|
P-620.2CD | N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology | N/A XY | N/A 0.1 nm | N/A 10 N | N/A 0.02 % | N/A 0.40 N/µm | N/A 0.20 nm | N/A 10 N |
N/A Specifications, CAD / Drawings, Manuals, Videos |
P-621.2CD | N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology | N/A XY | N/A 0.2 nm | N/A 10 N | N/A 0.02 % | N/A 0.25 N/µm | N/A 0.40 nm | N/A 10 N |
N/A Specifications, CAD / Drawings, Manuals, Videos |
P-622.2CD | N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology | N/A XY | N/A 0.4 nm | N/A 10 N | N/A 0.02 % | N/A 0.20 N/µm | N/A 0.70 nm | N/A 10 N |
N/A Specifications, CAD / Drawings, Manuals, Videos |
P-625.2CD | N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology | N/A XY | N/A 0.5 nm | N/A 10 N | N/A 0.03 % | N/A 0.10 N/µm | N/A 1.40 nm | N/A 10 N |
N/A Specifications, CAD / Drawings, Manuals, Videos |
P-628.2CD | N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology | N/A XY | N/A 0.5 nm | N/A 10 N | N/A 0.03 % | N/A 0.05 N/µm | N/A 3.50 nm | N/A 10 N |
N/A Specifications, CAD / Drawings, Manuals, Videos |
P-62x.20L | N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology | N/A XY | N/A | N/A | N/A | N/A | N/A | N/A |
N/A Specifications, CAD / Drawings, Manuals, Videos |