Catalog
  • U-523 PILine® Linear Stages

    Compact Linear Stage with Ultrasonic Piezo Motor

    Fast positioning

    Space-saving and light

    High guiding accuracy

    Self-locking, no heat generation at rest

    Low-noise operation

  • Q-545 Q-Motion® Precision Linear Stages

    Q-545 Q-Motion® Precision Linear Translation Stages, Nanopositioning

    (2)

    High Forces and Small Design Due to Piezo Motors

    Only 45 mm in width

    Incremental sensors with position resolution

    XY combinations without adapter plate possible

    Vacuum versions to 10-9 hPa available on request

  • U-723 PILine® XY Stages

    Compact XY Stage with Ultrasonic Piezo Motors

    Fast positioning in 2 axes

    Space-saving and light

    High guiding accuracy

    Self-locking, no heat generation at rest

    Low-noise operation

  • N-331 PICMAWalk Walking Drives

    N-331 PICMAWalk Ultra-Precision Linear Actuators

    (6)

    OEM Walking Drive for Durable Applications with up to 15 mm/s Velocity and up to 50 N Push/Pull Force

    Robust and industrially usable walking drive with PICMA® technology for extreme durability

    Fastest and strongest drive of its size class

    Variable runner lengths from 25 mm to 100 mm

    Precise, nanometer precision positioning of loads up to 5 kg

    Plug-and-play, thanks to PI proprietary controller technology

  • N-216 NEXLINE® Linear Actuators

    N-216 NEXLINE® Ultra-Precision Linear Actuators

    (4)

    Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

    Integrated direct-measuring linear encoder with resolution 5 nm

    Fields of application

    • Industrial precision positioning
    • Semiconductor technology
    • Semiconductor tests
    • Wafer inspection
    • Lithography
    • Nanoimprinting
    • Nanometrology
    • Motion in strong magnetic fields and in a vacuum
    Highly accurate position measuring with incremental linear encoder
    Noncontact optical encoders measure the position directly at the platform with themore
  • Q-521 Q-Motion® Miniature Linear Stages

    Q-521 Q-Motion® Miniature Linear Translation Stages

    (6)

    Smallest Linear Stage with Position Control, High Resolution and Affordable Price

    Multi-axis system setups with adapter plate or bracket (available as an option).

    Direct position measurement with integrated incremental encoder

    Vacuum versions to 10-6 hPa available on request.

    Piezoelectric inertia drive
    Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on amore