Item # M-850.50, Compact 6-Axis Hexapod Microrobot, Parallel Kinematics On PI (Physik Instrumente) L.P.

Six Degrees of Freedom
Works in Any Orientation
No Moving Cables for Improved Reliability and Precision
200 kg Load Capacity (Vertical)
Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
Repeatability to ±1 µm
Actuator Resolution to 0.005 µm
Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
Vacuum-Compatible Versions
Linear and Rotary Multi-Axis Scans
Virtualized Center of Rotation (Pivot Point)
Sophisticated Controller Using Vector Algorithms
20000 h MTBF

Unit of Measure

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