Catalog
Request Information
  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 10 kg
  • Travel Ranges to 45 mm (linear), 25° (rotation)
  • 7 nm Resolution
  • 300 nm Min. Incremental Motion
  • Repeatability ±0.5 µm
  • Very Compact Design
  • Self Locking to 10 kg
Unit of Measure