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 All Categories    Compact 6-Axis Parallel Kinematics Microrobot
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Hexapods Six-Axis Micropositioning Systems > Item # M-824.3DG
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Item # M-824.3DG, Compact 6-Axis Parallel Kinematics Microrobot

  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 10 kg
  • Travel Ranges to 45 mm (linear), 25° (rotation)
  • 7 nm Resolution
  • 300 nm Min. Incremental Motion
  • Repeatability ±0.5 µm
  • Very Compact Design
  • Self Locking to 10 kg


Travel Range X, Y

±22.5 mm

Travel Range Z

±12.5 mm

Travel Range X

±7.5 mm

Travel Range θX, θY

±7.5 °

Travel Range θZ

±12.5 °

Actuator Stroke

± 12.5 mm

Min. Incremental Motion X, Y

0.3 µm

Min. Incremental Motion Z

0.3 µm

Min. Incremental Motion θX, θY, θZ 1

3.5 µrad

Repeatability X, Y

±0.5 µm

Repeatability Z

±0.5 µm

Repeatability θX, θY, θZ

±6 µrad

Typ. Speed

0.5 mm/s

Typ. Speed θX, θY, θZ

0.35 º/sec

Max. Speed

1.0 mm/s

Max. Speed θX, θY, θZ

0.7 º/sec

Stiffness (kX, kY)

1.7 N/µm

Stiffness (kθZ)

7 N/µm

Load Capacity (Mounted Vertically)

10 kg (Self-locking)


7.8 kg


Life sciences


Semiconductor handling systems

Tool control for precision machining & manufacturing

X-ray diffraction measurements

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