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 All Categories    Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Micropositioning Actuators / Stages > Linear Translation Stages > Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings > Item # M-014.PS
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Item # M-014.PS, Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

  • Travel Range 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 µm
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 µm Resolution with Closed-Loop DC Motor
  • 5 nm Resolution with Closed-Loop PZT Drive
  • 30 mm Ø Clear Aperture


Travel Range

25 µm

Travel Range

25 mm

Min. Incremental Motion

1 µm

Max. Load

5.0 kg

Body Material



0.8 kg

Straightness / Flatness per 5 mm

0.1 µm

Straightness / Flatness Full Travel

0.3 µm

Max. Push Force

15 N

Max. Pull Force

5 N

Max. Lateral Force

10 N

Drive Screw Pitch

0.5 mm/rev.

Piezo Fine Travel Range

45 µm

Min. Incremental Motion (Piezo Drive)

0.005 µm

Piezo Drive


Repeatability (Piezo Drive)

0.09 µrad



Recommended Piezo Controller

D, H



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