PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Search Catalog
 All Categories    PICA™-Shear Piezo Actuators - Compact Multiaxis Motion
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezoelectric Actuators, Translators, Piezo Ceramic Components > Piezo Shear Actuators, Multi-Axis Actuators > PICA™-Shear Piezo Actuators - Compact Multiaxis Motion > Item # P-151.03H
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

Item # P-151.03H, PICA™-Shear Piezo Actuators - Compact Multiaxis Motion

  • Compact Multiaxis Actuators
  • X, XY, XZ and XYZ Versions
  • High Resonant Frequencies
  • Extreme Reliability >109 Cycles
  • Picometer-Resolution / Sub-Millisecond Settling Time
  • Optional Ultra-High-Vacuum-Compatible Versions to 10-9 hPa
  • Non-Magnetic and Clear Aperture Versions


Active Axes


Cross Section A x B / ID

16 x 16 / 10 mm

Length L

5.5 mm ±0.3

Max. Shear Load

200 N

Unloaded Resonant Frequency

210 kHz

Static Large-Signal Stiffness

870 N/µm


30 nF ±20%


Active vibration cancellation
Atomic force microscopy

Laser tuning

Linear motors


Precision mechanics

Scanning applications

Semiconductor manufacturing and testing


 CADs & Drawings, Manuals, Videos, Specs 

CADs & Drawings, Manuals, Videos, Specs

© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.