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 All Categories    Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
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> Photonics Alignment Solutions > Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems > Item # F-131.3SS
 
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Item # F-131.3SS, Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems



  • Up to 15 mm Travel
  • 1 nm Resolution
  • Closed-Loop Piezo Drives Available
  • Stepper- & DC-Motor Drives




 Specifications   

Key Features

Stepper motors, Closed-loop PZT Drives

Active Axes

XYZ

Motorized Travel Range (XYZ)

15 mm

Piezo Travel Range (XYZ)

100 µm

Design Resolution (Motor)

0.006 µm

Min. Incremental Motion (Motor)

0.05 µm

Closed Loop Resolution (PZT)

2 nm

Open Loop Resolution (PZT)

1 nm

Motorized Stage

M-111.32S

Material

Al
S


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