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Item # 6635911130, UPL-120 Precision Z Stages

Excellent accuracy for high loads

Integrated optical limit switches

Available with direct-measuring encoder

Reference-class Z stage
Extremely accurate and reliable positioning. Crossed roller guides for smooth feed at high loads. Stress-relieved aluminum base for highest stability. Drive variants with DC motor and 2-phase stepper motor. Noncontact limit switches.

Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Application fields
Industry and research, e.g., semiconductor inspection, fiber alignment.


Active Axes


Pitch (typ.)

±100 µrad

Yaw (typ.)

±100 µrad

Integrated Sensor

Rotary encoder
Linear Encoder

Sensor Signal Rotary Encoder

A/B quadrature, RS-422

Sensor Signal Linear Encoder

A/B quadrature, RS-422

Sensor Resolution Rotary Encoder

20000 Cts./rev.

Guide Type

Crossed roller guide with anti-creep system

Drive Screw Type

Ball screw

Gear Ratio


Push/Pull Force (Power On) (max.)

200 N

Holding Force (Power Off) (typ.)

40 N

Load Capacity (max.)

200 N

Permissible Lateral Force Fy in Y (max.)

150 N

Motor Type

DC motor

Nominal Operating Voltage

24 V

Max. Operating Voltage

48 V

Limit Switches


Operating Temperature Range

5 to 40 ºC

Mass Tolerance

±5 %

Moved Mass Tolerance

±5 %


Black Anodized Aluminum


Motor: HD D-sub 15 (m), sensor: D-sub 9 (m)

Recommended Controllers/Drivers

ACS modular controller
C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)


Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.


·  UPL-120 Precision Z Stages - 3

·  UPL-120 Precision Z Stages - 4

·  L-310 & UPL-120 Precision Z Stages

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