PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages


Search Catalog
      GO   
 All Categories    A-63x PIglide RL Flat Rotation Stages with Air Bearing
All Categories > A-63x PIglide RL Flat Rotation Stages with Air Bearing > Item # A-635  
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

Item # A-635, A-63x PIglide RL Flat Rotation Stages with Air Bearing



Friction-free, motorized

Option for self-locking at rest by magnetic preload

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance.

Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Application fields
Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.





 Specifications   

Travel Range

Unlimited, > 360º

Wobble (max.)

2 µrad

Load Capacity (Axial) (max.)

200 N

Load Capacity (Radial) (max.)

50 N

Load Torque (MX, Y) (max.)

5 Nm

Moment of Inertia

25,820 kg·mm²

Guide Type

Air bearing, magnetic preload

Drive Type

Torque motor, 3-phase, brushless, ironless, slotless

Nominal Intermediate Circuit Voltage (rms) (DC)

48 V

Max. Intermediate Circuit Voltage (RMS) (DC)

80 V

Peak Current (RMS) (max.)

13.9 A

Nominal Current (RMS) (max.)

4.5 A

Peak Torque (typ.)

9 Nm

Nominal Torque (typ.)

3 Nm

Torque Constant (RMS) (typ.)

0.66 Nm/A

Resistance Phase to Phase

4.5 O

Inductance Phase to Phase

0.6 mH

Back EMF Phase to Phase (max.)

80 V/kRPM

Integrated Sensor

Incremental Angle Measuring System

Sensor Signal

Sin/Cos, 1 V peak-peak

Lines/Revolution (A-63x.xxxAx)

31488
47200

Max. Velocity (A-63x.xxxAx)

500 rpm

Max. Velocity (A-63x.xxxBx)

500 rpm

Sensor Resolution (A-63x.xxxAx)

0.05 rpm

Sensor Resolution (A-63x.xxxBx)

0.03 rpm

Bidirectional Repeatability

± 2 µrad

Reference Switch

1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak

Operating Pressure

515 to 585 kPa

Air Quality

Clean (filtered to 1.0 µm or better) - ISO 8573-1 Class 1
Dry (-15 ºC dew point) - ISO 8573-1 Class 3

Oil free - ISO 8573-1 Class 1

Materials

Hardcoat Aluminum, Stainless Steel Mounting Hardware

3-Phase Torque Motor

  • Brushless
  • Slotless
  • Low cogging torque

Accessories and Options

  • Incremental or absolute encoder
  • Vacuum feedthrough
  • Self-locking at rest by magnetic preload
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Multi-axis/customized setups
  • Base plates made of granite and systems for reducing vibration


 CADs & Drawings, Manuals, Videos, Specs 

CADs & Drawings, Manuals, Videos, Specs




© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.