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 All Categories    A-63x PIglide RL Flat Rotation Stages with Air Bearing
All Categories > A-63x PIglide RL Flat Rotation Stages with Air Bearing > Item # A-635  
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Item # A-635, A-63x PIglide RL Flat Rotation Stages with Air Bearing

Friction-free, motorized

Option for self-locking at rest by magnetic preload

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance.

Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Application fields
Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.


Travel Range

Unlimited, > 360º

Wobble (max.)

2 µrad

Load Capacity (Axial) (max.)

200 N

Load Capacity (Radial) (max.)

50 N

Load Torque (MX, Y) (max.)

5 Nm

Moment of Inertia

25,820 kg·mm²

Guide Type

Air bearing, magnetic preload

Drive Type

Torque motor, 3-phase, brushless, ironless, slotless

Nominal Intermediate Circuit Voltage (rms) (DC)

48 V

Max. Intermediate Circuit Voltage (RMS) (DC)

80 V

Peak Current (RMS) (max.)

13.9 A

Nominal Current (RMS) (max.)

4.5 A

Peak Torque (typ.)

9 Nm

Nominal Torque (typ.)

3 Nm

Torque Constant (RMS) (typ.)

0.66 Nm/A

Resistance Phase to Phase

4.5 O

Inductance Phase to Phase

0.6 mH

Back EMF Phase to Phase (max.)

80 V/kRPM

Integrated Sensor

Incremental Angle Measuring System

Sensor Signal

Sin/Cos, 1 V peak-peak

Lines/Revolution (A-63x.xxxAx)


Max. Velocity (A-63x.xxxAx)

500 rpm

Max. Velocity (A-63x.xxxBx)

500 rpm

Sensor Resolution (A-63x.xxxAx)

0.05 rpm

Sensor Resolution (A-63x.xxxBx)

0.03 rpm

Bidirectional Repeatability

± 2 µrad

Reference Switch

1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak

Operating Pressure

515 to 585 kPa

Air Quality

Clean (filtered to 1.0 µm or better) - ISO 8573-1 Class 1
Dry (-15 ºC dew point) - ISO 8573-1 Class 3

Oil free - ISO 8573-1 Class 1


Hardcoat Aluminum, Stainless Steel Mounting Hardware

3-Phase Torque Motor

  • Brushless
  • Slotless
  • Low cogging torque

Accessories and Options

  • Incremental or absolute encoder
  • Vacuum feedthrough
  • Self-locking at rest by magnetic preload
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Multi-axis/customized setups
  • Base plates made of granite and systems for reducing vibration

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